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Multi-gate devices for the 32nm technology node and beyond

dc.contributor.authorCollaert, Nadine
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorDixit, Abhisek
dc.contributor.authorFerain, Isabelle
dc.contributor.authorLai, Li-Shyue
dc.contributor.authorLenoble, Damien
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorNackaerts, Axel
dc.contributor.authorPawlak, Bartek
dc.contributor.authorRooyackers, Rita
dc.contributor.authorSchulz, Thomas
dc.contributor.authorSan, Kemal Tamer
dc.contributor.authorSon, Nak Jin
dc.contributor.authorVan Dal, Mark
dc.contributor.authorVerheyen, Peter
dc.contributor.authorvon Arnim, Klaus
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorBiesemans, Serge
dc.contributor.authorJurczak, Gosia
dc.date.accessioned2021-10-16T15:22:04Z
dc.date.available2021-10-16T15:22:04Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11894
dc.sourceIIOimport
dc.titleMulti-gate devices for the 32nm technology node and beyond
dc.typeProceedings paper
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorVan Dal, Mark
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage143
dc.source.endpage146
dc.source.conferenceProceedings of the 37th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate11/09/2007
dc.source.conferencelocationMünchen Germany
imec.availabilityPublished - imec


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