Authors

Collaert, Nadine; Rooyackers, Rita; Dilliway, Gabriela; Iyengar, Vikram; Augendre, Emmanuel; Leys, Frederik; Cayrefourcq, I.; Ghyselen, B.; Loo, Roger; Jurczak, Gosia; Biesemans, Serge

Conference

International Symposium on VLSI Technology, Systems, and Applications - VLSI-TSA

Title

Optimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESL

Publication type

Proceedings paper