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Optimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESL

dc.contributor.authorCollaert, Nadine
dc.contributor.authorRooyackers, Rita
dc.contributor.authorDilliway, Gabriela
dc.contributor.authorIyengar, Vikram
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorLeys, Frederik
dc.contributor.authorCayrefourcq, I.
dc.contributor.authorGhyselen, B.
dc.contributor.authorLoo, Roger
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T15:22:23Z
dc.date.available2021-10-16T15:22:23Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11896
dc.sourceIIOimport
dc.titleOptimization of the MuGFET performance on super critical-strained SOI (SC-SSOI)substrates featuring raised source/drain and dual CESL
dc.typeProceedings paper
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceInternational Symposium on VLSI Technology, Systems, and Applications - VLSI-TSA
dc.source.conferencedate23/04/2007
dc.source.conferencelocationHsinchu Taiwan
imec.availabilityPublished - imec


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