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Impact of ceria properties and CMP parameters on STI CMP performance

dc.contributor.authorDe Messemaeker, Jo
dc.contributor.authorPut, Stijn
dc.contributor.authorNelis, Daniel
dc.contributor.authorVan den bosch, Jeroen
dc.contributor.authorStrauven, Yvan
dc.contributor.authorLippens, Paul
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorOng, Patrick
dc.contributor.authorDevriendt, Katia
dc.date.accessioned2021-10-16T15:31:26Z
dc.date.available2021-10-16T15:31:26Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11957
dc.sourceIIOimport
dc.titleImpact of ceria properties and CMP parameters on STI CMP performance
dc.typeProceedings paper
dc.contributor.imecauthorVan den bosch, Jeroen
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.source.peerreviewyes
dc.source.beginpage303
dc.source.endpage308
dc.source.conferenceInternational Conference on Planarization/CMP Technology - ICPT
dc.source.conferencedate25/10/2007
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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