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dc.contributor.authorDe Messemaeker, Jo
dc.contributor.authorPut, Stijn
dc.contributor.authorNelis, Daniel
dc.contributor.authorVan den bosch, Jeroen
dc.contributor.authorStrauven, Yvan
dc.contributor.authorLippens, Paul
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorOng, Patrick
dc.contributor.authorDevriendt, Katia
dc.date.accessioned2021-10-16T15:31:26Z
dc.date.available2021-10-16T15:31:26Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11957
dc.sourceIIOimport
dc.titleImpact of ceria properties and CMP parameters on STI CMP performance
dc.typeProceedings paper
dc.contributor.imecauthorVan den bosch, Jeroen
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.source.peerreviewyes
dc.source.beginpage303
dc.source.endpage308
dc.source.conferenceInternational Conference on Planarization/CMP Technology - ICPT
dc.source.conferencedate25/10/2007
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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