3D integration technology developments at IMEC

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Authors
De Moor, Piet; Ruythooren, Wouter; Soussan, Philippe; Baert, Kris; Van Hoof, Chris; Swinnen, Bart; Beyne, Eric
Conference
1st Int. IEEE Workshop on Low Temperature Bonding for 3D Integration
Title
3D integration technology developments at IMEC
Publication type
Proceedings paper
Embargo date
9999-12-31
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