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Critical processes for ultra-thin gate oxide integrity
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Authors
Depas, Michel
;
Heyns, Marc
;
Nigam, Tanya
;
Kenis, Karine
;
Sprey, Hessel
;
Wilhelm, H.
;
Wilhelm, Rudi
;
Crossley, A.
;
Sofield, C. J.
;
Gräf, D.
Conference
Proceedings of the 3rd International Symposium on the Physics and Chemistry of SiO2 and the SiO2 Interface
Title
Critical processes for ultra-thin gate oxide integrity
Publication type
Proceedings paper
Embargo date
9999-12-31
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