Publication:

Atomic layer deposition of hafnium silicate gate dielectric layers

Date

2007

Journal article

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Files

15708.pdf 383.43 KB

Author(s)

Delabie, Annelies

;

Pourtois, Geoffrey

;

;

De Gendt, Stefan

;

Ragnarsson, Lars-Ake

;

;

Fedorenko, Yanina

;

;

Journal

Journal of Vacuum Science and Technology A

Statistics

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Acq. date: 2026-04-25