Atomic layer deposition of hafnium silicate gate dielectric layers

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Authors

Delabie, Annelies; Pourtois, Geoffrey; Caymax, Matty; De Gendt, Stefan; Ragnarsson, Lars-Ake; Heyns, Marc; Fedorenko, Yanina; Swerts, Johan; Maes, Jan

Issue

4

Journal

Journal of Vacuum Science and Technology A

Volume

25

Title

Atomic layer deposition of hafnium silicate gate dielectric layers

Publication type

Journal article

Embargo date

9999-12-31

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