Publication:
Etch of Yb-doped poly gates to achieve low vt Ni-FUSI CMOS
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1789 since deposited on 2021-10-16
1last month
Acq. date: 2026-09-14
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Views
1789 since deposited on 2021-10-16
1last month
Acq. date: 2026-09-14
Citations