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A novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base process

dc.contributor.authorDonkers, Johan
dc.contributor.authorKramer, Mark
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorChoi, Li Jen
dc.contributor.authorMeunier-Beillard, Philippe
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorvan Noort, W.
dc.contributor.authorHurkx, G.A.M.
dc.contributor.authorVanhoucke, Tony
dc.contributor.authorSibaja-Hernandez, Arturo
dc.contributor.authorVleugels, Frank
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorKunnen, Eddy
dc.contributor.authorPeeters, Stefan
dc.contributor.authorBaute, Debbie
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorLoo, Roger
dc.contributor.authorVenegas, Rafael
dc.contributor.authorPijper, R.
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorHijzen, Erwin
dc.date.accessioned2021-10-16T15:53:38Z
dc.date.available2021-10-16T15:53:38Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12087
dc.sourceIIOimport
dc.titleA novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base process
dc.typeProceedings paper
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorSibaja-Hernandez, Arturo
dc.contributor.imecauthorVleugels, Frank
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorPeeters, Stefan
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewyes
dc.source.beginpage655
dc.source.endpage658
dc.source.conferenceTechnical Digest International Electron Devices Meeting - IEDM
dc.source.conferencedate10/12/2007
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - imec


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