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Optical absorption and characteristics of low-k films and barrier layers in the UV range

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorEymery, Guillaume
dc.contributor.authorFoubert, Philippe
dc.contributor.authorIacopi, Francesca
dc.contributor.authorMaex, Karen
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-16T16:03:01Z
dc.date.available2021-10-16T16:03:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12134
dc.sourceIIOimport
dc.titleOptical absorption and characteristics of low-k films and barrier layers in the UV range
dc.typeMeeting abstract
dc.contributor.imecauthorFoubert, Philippe
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium B: Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nano
dc.source.conferencedate9/04/2007
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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