Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Optical absorption and characteristics of low-k films and barrier layers in the UV range
Publication:
Optical absorption and characteristics of low-k films and barrier layers in the UV range
Copy permalink
Date
2007
Meeting abstract
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eslava Fernandez, Salvador
;
Eymery, Guillaume
;
Foubert, Philippe
;
Iacopi, Francesca
;
Maex, Karen
;
Baklanov, Mikhaïl
Journal
Abstract
Description
Metrics
Views
1863
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-12
Citations
Metrics
Views
1863
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-12
Citations