Authors

Donaton, R. A.; Maex, Karen; Vantomme, Andre; St. Amour, A.; Sturm, J. C.

Conference

Materials Research Society Spring Meeting. Symposium F on GeSi and Related Compounds; April 9-11, 1996; San Francisco, Calif., U

Title

Comparison of Co silicidation on SiGe and SiGeC alloys

Publication type

Oral presentation