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Measurement and evaluation of water uptake by resists, top coats and stacks and correlation with watermark defects
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Authors
Foubert, Philippe
;
Kocsis, Michael
;
Gronheid, Roel
;
Kishimura, Shinji
;
Soyano, Akimasa
;
Nafus, Kathleen
;
Stepanenko, Nickolay
;
De Backer, Johan
;
Vandenbroeck, Nadia
;
Ercken, Monique
Conference
Advances in Resist Materials and Processing Technology XXIV
Title
Measurement and evaluation of water uptake by resists, top coats and stacks and correlation with watermark defects
Publication type
Proceedings paper
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