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Comparison of Co silicidation on SiGe and SiGeC alloys

dc.contributor.authorDonaton, R. A.
dc.contributor.authorMaex, Karen
dc.contributor.authorVantomme, Andre
dc.contributor.authorSt. Amour, A.
dc.contributor.authorSturm, J. C.
dc.date.accessioned2021-09-29T14:28:25Z
dc.date.available2021-09-29T14:28:25Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1216
dc.sourceIIOimport
dc.titleComparison of Co silicidation on SiGe and SiGeC alloys
dc.typeOral presentation
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVantomme, Andre
dc.source.peerreviewno
dc.source.conferenceMaterials Research Society Spring Meeting. Symposium F on GeSi and Related Compounds; April 9-11, 1996; San Francisco, Calif., U
dc.source.conferencelocation
imec.availabilityPublished - imec


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