Authors

Giangrandi, Simone; Brijs, Bert; Arstial, K.; Sajavaara, T.; Vantomme, Andre; Vandervorst, Wilfried

Conference

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling

Title

Potentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin films

Publication type

Oral presentation