Show simple item record

Potentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin films

dc.contributor.authorGiangrandi, Simone
dc.contributor.authorBrijs, Bert
dc.contributor.authorArstial, K.
dc.contributor.authorSajavaara, T.
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T16:16:02Z
dc.date.available2021-10-16T16:16:02Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12194
dc.sourceIIOimport
dc.titlePotentialities and limitations of low-energy TOF-ERDA for high resolution and quantitative profiling of thin films
dc.typeOral presentation
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
dc.source.conferencedate6/05/2007
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record