Highly reliable and extremely stable SiGe micro-mirrors

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Authors
Gromova, Maria; Haspeslagh, Luc; Verbist, Agnes; Du Bois, Bert; Van Hoof, Rita; Eyckens, Brenda; Sijmus, Bram; De Wolf, Ingrid; Simons, Veerle; Muller, Philippe; Lauwagie, Tom; Willegems, Myriam; Locorotondo, Sabrina; Boullart, Werner; Baert, Kris; Witvrouw, Ann
Conference
Technical Digest 20th IEEE International Micro Electro Mechanical Systems Conference - MEMS
Title
Highly reliable and extremely stable SiGe micro-mirrors
Publication type
Proceedings paper
Embargo date
9999-12-31
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