Show simple item record

Highly reliable and extremely stable SiGe micro-mirrors

dc.contributor.authorGromova, Maria
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorVerbist, Agnes
dc.contributor.authorDu Bois, Bert
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorEyckens, Brenda
dc.contributor.authorSijmus, Bram
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorSimons, Veerle
dc.contributor.authorMuller, Philippe
dc.contributor.authorLauwagie, Tom
dc.contributor.authorWillegems, Myriam
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorBoullart, Werner
dc.contributor.authorBaert, Kris
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-16T16:24:19Z
dc.date.available2021-10-16T16:24:19Z
dc.date.issued2007-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12230
dc.sourceIIOimport
dc.titleHighly reliable and extremely stable SiGe micro-mirrors
dc.typeProceedings paper
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorWillegems, Myriam
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage759
dc.source.endpage762
dc.source.conferenceTechnical Digest 20th IEEE International Micro Electro Mechanical Systems Conference - MEMS
dc.source.conferencedate21/01/2007
dc.source.conferencelocationKobe Japan
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
12746.pdf
Size:
1.172Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record