Authors

Hantschel, Thomas; Schulz, Volker; Zschaetzsch, Gerd; Eyben, Pierre; Verhulst, Anne; Schmidt, Volker; Vereecken, Philippe; Van den Bosch, Geert; Vandervorst, Wilfried

Conference

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling

Title

Carrier profiling of a cross-sectioned silicon nanowire by scanning spreading resistance microscopy

Publication type

Proceedings paper