Authors

Hardy, An; Van Elshocht, Sven; Van Bael, Marlies; D'Haen, Jan; Douheret, Olivier; De Gendt, Stefan; Adelmann, Christoph; Caymax, Matty; Conard, Thierry; Witters, Thomas; D'Olieslaeger, Marc; Heyns, Marc; Mullens, J

Conference

10th International Conference and Exhibition of the European Ceramic Society

Title

Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films

Publication type

Proceedings paper