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Aqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films

dc.contributor.authorHardy, An
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDouheret, Olivier
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorCaymax, Matty
dc.contributor.authorConard, Thierry
dc.contributor.authorWitters, Thomas
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorMullens, J
dc.date.accessioned2021-10-16T16:30:31Z
dc.date.available2021-10-16T16:30:31Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12255
dc.sourceIIOimport
dc.titleAqueous chemical solution deposition and characterization of ultrathin high-k dielectric metal oxide films
dc.typeProceedings paper
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conference10th International Conference and Exhibition of the European Ceramic Society
dc.source.conferencedate17/06/2007
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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