Authors

Iyengar, Vikram V.; Kottantharayil, Anil; Tranjan, Farid M.; Jurczak, Gosia; De Meyer, Kristin

Issue

5

Journal

IEEE Trans. Electron Devices

Volume

54

Title

Extraction of the top and sidewall mobility in FinFETs and the impact of fin-patterning processes and gate dielectrics on mobility

Publication type

Journal article

Embargo date

9999-12-31