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Local removal frequency of nano particles in megasonic cleaning
Publication:
Local removal frequency of nano particles in megasonic cleaning
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Date
2007
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Janssens, Tom
;
Wostyn, Kurt
;
Arnauts, Sophia
;
De Geyter, Annelies
;
Bearda, Twan
;
Mertens, Paul
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Views
1840
since deposited on 2021-10-16
1
last month
1
last week
Acq. date: 2026-02-25
Citations