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Local removal frequency of nano particles in megasonic cleaning

dc.contributor.authorJanssens, Tom
dc.contributor.authorWostyn, Kurt
dc.contributor.authorArnauts, Sophia
dc.contributor.authorDe Geyter, Annelies
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.date.accessioned2021-10-16T16:56:10Z
dc.date.available2021-10-16T16:56:10Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12359
dc.sourceIIOimport
dc.titleLocal removal frequency of nano particles in megasonic cleaning
dc.typeProceedings paper
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage353
dc.source.endpage360
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
dc.source.conferencedate20/07/2007
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - open access
imec.internalnotesECS Trans.; Vol. 11, issue 2


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