dc.contributor.author | Kalio, Andre | |
dc.contributor.author | Richard, Olivier | |
dc.contributor.author | Sourty, Erwan | |
dc.contributor.author | Bender, Hugo | |
dc.date.accessioned | 2021-10-16T17:02:16Z | |
dc.date.available | 2021-10-16T17:02:16Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12382 | |
dc.source | IIOimport | |
dc.title | Automated quantification of dimensions on tomographic reconstructions of semiconductor devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Richard, Olivier | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 387 | |
dc.source.endpage | 390 | |
dc.source.conference | Microscopy of Semiconducting Materials XV | |
dc.source.conferencedate | 2/04/2007 | |
dc.source.conferencelocation | Cambridge UK | |
imec.availability | Published - open access | |
imec.internalnotes | Springer Proceedings in Physics; Vol. 120 | |