Authors

Kirsch, Philippe; Assouar, Mohammed B.; Elmazria, Omar; El Hakiki, M.; Mortet, Vincent; Alnot, Patrick

Issue

7

Journal

IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control

Volume

54

Title

Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band

Publication type

Journal article

Embargo date

9999-12-31