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Low temperature epitaxy and the importance of moisture control

dc.contributor.authorLeys, Frederik
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorDe Vos, Brecht
dc.contributor.authorGeenen, Luc
dc.contributor.authorVan Daele, Benny
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-16T17:25:55Z
dc.date.available2021-10-16T17:25:55Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12470
dc.sourceIIOimport
dc.titleLow temperature epitaxy and the importance of moisture control
dc.typeOral presentation
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorDe Vos, Brecht
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conference5th International Conferencce on Silicon Epitaxy and Heterostructures - ICSI-5
dc.source.conferencedate20/05/2007
dc.source.conferencelocationMarseille France
imec.availabilityPublished - imec


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