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On the interaction between inter-metal dielectric reliability and electromigration stress

dc.contributor.authorLi, Yunlong
dc.contributor.authorBruynseraede, Christophe
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-16T17:27:49Z
dc.date.available2021-10-16T17:27:49Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12477
dc.sourceIIOimport
dc.titleOn the interaction between inter-metal dielectric reliability and electromigration stress
dc.typeProceedings paper
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.source.peerreviewyes
dc.source.beginpage642
dc.source.endpage643
dc.source.conference45th IEEE International Reliability Physics Symposium Proceedings - IRPS
dc.source.conferencedate14/04/2007
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - imec


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