Publication:

Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

Date

2007
Journal article
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Author(s)

Li, Zilan
;
Schram, Tom  
;
Pantisano, Luigi
;
Stesmans, Andre  
;
Conard, Thierry  
;
Shamuilia, Sheron
;
Afanasiev, Valeri  
;
Akheyar, Amal
;
Van Elshocht, Sven  
;
Brunco, David
;
Deweerd, Wim
;
Naoki, Yamada
;
Lehnen, Peer
;
De Gendt, Stefan  
;
De Meyer, Kristin  

Journal

Microelectronics Reliability

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1915 since deposited on 2021-10-16
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