Publication:
Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks
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1922 since deposited on 2021-10-16
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Acq. date: 2026-08-05
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Statistics
Views
1922 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-08-05
Citations