Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

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Authors

Li, Zilan; Schram, Tom; Pantisano, Luigi; Stesmans, Andre; Conard, Thierry; Shamuilia, Sheron; Afanasiev, Valeri; Akheyar, Amal; Van Elshocht, Sven; Brunco, David; Deweerd, Wim; Naoki, Yamada; Lehnen, Peer; De Gendt, Stefan; De Meyer, Kristin

Issue

4_5

Journal

Microelectronics Reliability

Volume

47

Title

Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

Publication type

Journal article

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