Publication:

Mechanism of O2-anneal induced Vfb shifts of Ru gated stacks

Date

2007

Journal article

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Author(s)

;

;

Pantisano, Luigi

;

Stesmans, Andre

;

Conard, Thierry

;

Shamuilia, Sheron

;

Afanasiev, Valeri

;

;

Van Elshocht, Sven

;

;

;

;

;

De Gendt, Stefan

;

De Meyer, Kristin

Journal

Microelectronics Reliability

Statistics

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