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Forming gas anneal induced flat-band voltage shift of metal-oxide-semiconductor stacks and its link with hydrogen incorporation in metal gates

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1960 since deposited on 2021-10-16
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Acq. date: 2026-08-10

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1960 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-08-10

Citations