Investigation on molybdenum and its conductive oxides as p-type metal gate candidates

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Authors
Li, Zilan; Schram, Tom; Witters, Thomas; Cho, Hag-Ju; O'Sullivan, Barry; Hooker, Jacob; De Gendt, Stefan; De Meyer, Kristin
Conference
Physics and Technology of High-k Dielectrics
Title
Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
Publication type
Proceedings paper
Embargo date
9999-12-31
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