dc.contributor.author | Li, Zilan | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Cho, Hag-Ju | |
dc.contributor.author | O'Sullivan, Barry | |
dc.contributor.author | Hooker, Jacob | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | De Meyer, Kristin | |
dc.date.accessioned | 2021-10-16T17:30:41Z | |
dc.date.available | 2021-10-16T17:30:41Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12486 | |
dc.source | IIOimport | |
dc.title | Investigation on molybdenum and its conductive oxides as p-type metal gate candidates | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | O'Sullivan, Barry | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | De Meyer, Kristin | |
dc.contributor.orcidimec | O'Sullivan, Barry::0000-0002-9036-8241 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 575 | |
dc.source.endpage | 583 | |
dc.source.conference | Physics and Technology of High-k Dielectrics | |
dc.source.conferencedate | 7/10/2007 | |
dc.source.conferencelocation | Washington USA | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Trans.; Vol. 11, issue 4 | |