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Strained Si-on-insulator for advanced CMOS devices

dc.contributor.authorMantl, S.
dc.contributor.authorBuca, D.
dc.contributor.authorZhao, Q.T.
dc.contributor.authorHollander, B.
dc.contributor.authorFeste, S.
dc.contributor.authorLuysberg, M.
dc.contributor.authorReiche, M.
dc.contributor.authorGosele, U.
dc.contributor.authorBuchholtz, W.
dc.contributor.authorWei, A.
dc.contributor.authorHorstmann, M.
dc.contributor.authorLoo, Roger
dc.contributor.authorNguyen, Duy
dc.date.accessioned2021-10-16T17:48:54Z
dc.date.available2021-10-16T17:48:54Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12549
dc.sourceIIOimport
dc.titleStrained Si-on-insulator for advanced CMOS devices
dc.typeOral presentation
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conference4th Int. Workshop on Future Information Processing Technology - IWFIPT
dc.source.conferencedate3/09/2007
dc.source.conferencelocationBologna Italy
imec.availabilityPublished - imec


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