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Electrical characterization of leaky charge-trapping high-k MOS devices using pulsed Q-V
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Authors
Martens, Koen
;
Rosmeulen, Maarten
;
Kaczer, Ben
;
Groeseneken, Guido
;
Maes, Herman
Issue
5
Journal
IEEE Electron Device Letters
Volume
2007
Title
Electrical characterization of leaky charge-trapping high-k MOS devices using pulsed Q-V
Publication type
Journal article
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