The impact of ultra thin ALD TiN metal gate on low frequency noise of CMOS transistors

Publication:

2007

Proceedings Paper

Author(s)

;

Singanamalla, Raghunath

;

Subramanian, Vaidy

;

;

Sansen, Willy

;

;

;

1908 since deposited on 2021-10-16

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Acq. date: 2026-02-28