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Formation of porous alumina patterns on silicon

dc.contributor.authorMoral Vico, Antonio Javier
dc.contributor.authorJansen, Frederik
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorMaex, Karen
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-16T18:02:47Z
dc.date.available2021-10-16T18:02:47Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12594
dc.sourceIIOimport
dc.titleFormation of porous alumina patterns on silicon
dc.typeProceedings paper
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpage85
dc.source.endpage93
dc.source.conferenceElectrochemical Deposition on Non-Metallic Surfaces, Patterned Substrates, and Templates
dc.source.conferencedate29/10/2006
dc.source.conferencelocationCancun Mexico
imec.availabilityPublished - imec
imec.internalnotesECS Trans.; Vol. 3, issue 21


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