Authors

Nguyen, Duy; Loo, Roger; Hikavyy, Andriy; Van Daele, Benny; Ryan, Paul; Wormington, Matthew; Hopkins, John

Conference

Analytical Techniques for Semiconductor Materials and Process Characterization 5 - ALTECH

Title

In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction

Publication type

Proceedings paper