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In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
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Authors
Nguyen, Duy
;
Loo, Roger
;
Hikavyy, Andriy
;
Van Daele, Benny
;
Ryan, Paul
;
Wormington, Paul
;
Hopkins, John
Conference
3rd International Workshop on New Group IV Semiconductor Nanoelectronics
Title
In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction
Publication type
Oral presentation
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