Publication:
Study of dopant diffusion and defect evolution for advanced ultra shallow junctions based on atomistic kinetic monte carlo approach
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1950 since deposited on 2021-10-16
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Acq. date: 2026-08-05
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Statistics
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1950 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-08-05
Citations