Improved understanding and characterisation of rapid thermal oxides

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Authors
Horzel, Jörg; Storm, Wolfgang; Trenkler, Thomas; Sivoththaman, Sivanarayanamoorthy; Nijs, Johan; Mertens, Robert; Adriaenssens, G.
Conference
Conference Record of the 25th IEEE Photovoltaic Specialists Conference
Title
Improved understanding and characterisation of rapid thermal oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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