Improved understanding and characterisation of rapid thermal oxides
dc.contributor.author | Horzel, Jörg | |
dc.contributor.author | Storm, Wolfgang | |
dc.contributor.author | Trenkler, Thomas | |
dc.contributor.author | Sivoththaman, Sivanarayanamoorthy | |
dc.contributor.author | Nijs, Johan | |
dc.contributor.author | Mertens, Robert | |
dc.contributor.author | Adriaenssens, G. | |
dc.date.accessioned | 2021-09-29T14:34:31Z | |
dc.date.available | 2021-09-29T14:34:31Z | |
dc.date.issued | 1996 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1264 | |
dc.source | IIOimport | |
dc.title | Improved understanding and characterisation of rapid thermal oxides | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Mertens, Robert | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 581 | |
dc.source.endpage | 584 | |
dc.source.conference | Conference Record of the 25th IEEE Photovoltaic Specialists Conference | |
dc.source.conferencedate | 13/05/1996 | |
dc.source.conferencelocation | Washington, DC USA | |
imec.availability | Published - open access |