Authors

O'Sullivan, Barry; Kaushik, Vidya; Everaert, Jean-Luc; Trojman, Lionel; Ragnarsson, Lars-Ake; Pantisano, Luigi; Rohr, Erika; De Gendt, Stefan; Heyns, Marc

Issue

7

Journal

IEEE Trans. Electron Devices

Volume

54

Title

Effectiveness of nitridation of hafnium silicate dielectrics: a comparison between thermal and plasma nitridation

Publication type

Journal article