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Effectiveness of nitridation of hafnium silicate dielectrics: a comparison between thermal and plasma nitridation
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1940 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-11
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Metrics
Views
1940 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-11
Citations