Authors

Hurd, Trace; Schmidt, Harald; Rotondaro, Antonio; Mertens, Paul; Hall, L. H.; Heyns, Marc

Conference

Proceedings of the Fourth International Symposium on Cleaning technology in Semiconductor Device Manufacturing

Title

Metal interactions with silica (SiO2) surfaces: adsorption and ion exchange

Publication type

Proceedings paper

Embargo date

9999-12-31