Authors

O'Sullivan, Barry; Pourtois, Geoffrey; Kaushik, Vidya; Schram, Tom; Kittl, Jorge; Pantisano, Luigi; De Gendt, Stefan; Heyns, Marc

Issue

3

Journal

Applied Physics Letters

Volume

91

Title

Charge characterisation in metal-gate/high-k layers: Effect of post-deposition annealing and gate electrode

Publication type

Journal article