Publication:

Tuning PMOS Mo(O,N) metal gates to NMOS by addition of DyO capping layer

Date

2007
Proceedings Paper
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Author(s)

Petry, Jasmine
;
Singanamalla, Raghunath
;
Xiong, K.
;
Ravit, C.
;
Simoen, Eddy  
;
O'Connor, Robert
;
Veloso, Anabela  
;
Adelmann, Christoph  
;
Van Elshocht, Sven  
;
Paraschiv, Vasile  
;
Brus, Stephan  
;
Van Berkum, J.
;
Kubicek, Stefan  
;
De Meyer, Kristin  
;
Biesemans, Serge  
;
Hooker, Jacob

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