Improved nano-scale characterization of high-k dielectrics with vacuum C-AFM

Publication:

2007

Meeting abstract

Author(s)

Polspoel, Wouter

;

Aguilera, Lidia

;

;

Volodin, Alexander

;

Van Haesendonck, Chris

;

1897 since deposited on 2021-10-16

2last month

Acq. date: 2026-10-05