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Improved nano-scale characterization of high-k dielectrics with vacuum C-AFM

dc.contributor.authorPolspoel, Wouter
dc.contributor.authorAguilera, Lidia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVolodin, Alexander
dc.contributor.authorVan Haesendonck, Chris
dc.contributor.authorConard, Thierry
dc.date.accessioned2021-10-16T18:44:23Z
dc.date.available2021-10-16T18:44:23Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12725
dc.sourceIIOimport
dc.titleImproved nano-scale characterization of high-k dielectrics with vacuum C-AFM
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceWorkshop on Scanning Probe Microscopy and Spectroscopy
dc.source.conferencedate26/10/2007
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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