Authors

Rehman Khan, Aaliya; Stangl, J.; Bauer, G.; Buca, D.; Holländer, B.; Trinkhaus, H.; Mantl, S.; Loo, Roger; Caymax, Matty

Issue

1

Journal

Semiconductor Science and Technology

Volume

22

Title

Study of the relaxation of strain in patterned Si/SiGe structures using an x-ray diffraction technique

Publication type

Journal article

Embargo date

9999-12-31