Publication:
Sidewall damage in silica-based low-k material induced by different patterning plasma processes studied by energy filtered and analytical scanning TEM
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1787 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-16
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Metrics
Views
1787 since deposited on 2021-10-16
2last month
Acq. date: 2025-12-16
Citations