Show simple item record

Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency

dc.contributor.authorRooyackers, Rita
dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorDegroote, Bart
dc.contributor.authorCollaert, Nadine
dc.contributor.authorNackaerts, Axel
dc.contributor.authorDixit, Abhisek
dc.contributor.authorVandeweyer, Tom
dc.contributor.authorPawlak, Bartek
dc.contributor.authorErcken, Monique
dc.contributor.authorKunnen, Eddy
dc.contributor.authorDilliway, Gabriela
dc.contributor.authorLeys, Frederik
dc.contributor.authorLoo, Roger
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T19:10:24Z
dc.date.available2021-10-16T19:10:24Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12804
dc.sourceIIOimport
dc.titleDoubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
dc.typeOral presentation
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVandeweyer, Tom
dc.contributor.imecauthorPawlak, Bartek
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceIEEE International Solid-State Circuits Conference - ISSCC
dc.source.conferencedate11/02/2007
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record